A new, freely programmable, scalable control system for academic research purposes was developed. The intention was, to have a control unit capable of handling multiple PT1000 temperature sensors at reasonable accuracy and temperature range, as well as digital input signals and providing powerful output signals. To take full advantage of the system...

By S Epple, R Jung, K Jalba, V Nasui

More and more old machines have the problem that their control electronics’ lifecycle comes to its intended end of life, whilst the mechanics itself and process capability is still in very good condition. This article shows an example of a reactive ion etcher originally built in 1988, which was refitted with a new control concept. The origina...

By S Epple, C K Jalba, A Muminovic, R Jung